Open AccessCharacterization of homemade UV-LED photolithography to realize high aspect ratio channels
Author(s) -
Rayzi Rizqika,
Yudan Whulanza,
Jérôme Charmet,
Gandjar Kiswanto,
Tresna Priyana Soemardi
Publication year - 2020
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/5.0000873
Subject(s) - photolithography , microfluidics , materials science , channel (broadcasting) , nanotechnology , characterization (materials science) , optoelectronics , computational lithography , computer science , resist , telecommunications , multiple patterning , layer (electronics)
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