Open AccessPiezoelectric bimorph MEMS speakers
Author(s) -
Yiming Lang,
Chengze Liu,
Ahmed Fawzy,
Chen Sun,
Shaobo Gong,
Menglun Zhang
Publication year - 2022
Publication title -
nanotechnology and precision engineering
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.232
H-Index - 12
eISSN - 2589-5540
pISSN - 1672-6030
DOI - 10.1063/10.0013406
Subject(s) - bimorph , microelectromechanical systems , unimorph , diaphragm (acoustics) , cantilever , voltage , acoustics , piezoelectricity , materials science , total harmonic distortion , electrical engineering , vibration , physics , engineering , optoelectronics , composite material
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