Open AccessReview of flexible microelectromechanical system sensors and devices
Author(s) -
Xiaopeng Yang,
Menglun Zhang
Publication year - 2021
Publication title -
nanotechnology and precision engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.232
H-Index - 12
eISSN - 2589-5540
pISSN - 1672-6030
DOI - 10.1063/10.0004301
Subject(s) - microelectromechanical systems , flexibility (engineering) , wearable computer , fabrication , wearable technology , nanotechnology , engineering , materials science , computer science , embedded system , medicine , statistics , alternative medicine , mathematics , pathology
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