Open AccessInterfacial stress characterization of GaN epitaxial layer with sapphire substrate by confocal Raman spectroscopy
Author(s) -
Zengqi Zhang,
Zongwei Xu,
Ying Song,
Tao Liu,
Bing Dong,
Jiayu Liu,
Hong Wang
Publication year - 2021
Publication title -
nanotechnology and precision engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.232
H-Index - 12
eISSN - 2589-5540
pISSN - 1672-6030
DOI - 10.1063/10.0003818
Subject(s) - materials science , raman spectroscopy , gallium nitride , epitaxy , sapphire , optoelectronics , substrate (aquarium) , layer (electronics) , optics , laser , nanotechnology , oceanography , physics , geology
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