Open AccessDesign of a hexagonal air-coupled capacitive micromachined ultrasonic transducer for air parametric array
Author(s) -
Xiaoli Zhang,
Hui Zhang,
Dachao Li
Publication year - 2021
Publication title -
nanotechnology and precision engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.232
H-Index - 12
eISSN - 2589-5540
pISSN - 1672-6030
DOI - 10.1063/10.0003504
Subject(s) - capacitive micromachined ultrasonic transducers , acoustics , parametric array , ultrasonic sensor , capacitive sensing , transducer , parametric statistics , materials science , directivity , engineering , electrical engineering , acoustic wave , physics , statistics , mathematics , antenna (radio)
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