Open AccessComment on ‘‘Current-density profiles for a Ga+ ion microprobe and their lithographic implications’’ [Appl. Phys. Lett. 5 1, 1960 (1987)]
Author(s) -
R. L. Kubena,
J. W. Ward
Publication year - 1988
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.99566
Subject(s) - microprobe , lithography , ion , materials science , condensed matter physics , physics , crystallography , chemistry , optoelectronics , nuclear physics , quantum mechanics
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