Open AccessLow-temperature ion beam mixing of Pt and Si markers in Ge
Author(s) -
Sung Joon Kim,
M−A. Nicolet,
R. S. Averback,
P. M. Baldo
Publication year - 1985
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.95719
Subject(s) - mixing (physics) , ion beam mixing , ion , atomic physics , irradiation , silicon , materials science , chemistry , ion beam , ion beam deposition , physics , nuclear physics , metallurgy , organic chemistry , quantum mechanics
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