Open AccessElectron-beam-induced current measurements in silicon-on-insulator films prepared by zone-melting recrystallization
Author(s) -
E. W. Maby,
Harry A. Atwater,
Arthur Keigler,
N. M. Johnson
Publication year - 1983
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.94359
Subject(s) - materials science , grain boundary , recrystallization (geology) , silicon , silicon on insulator , cathode ray , condensed matter physics , optoelectronics , electron , composite material , microstructure , geology , physics , paleontology , quantum mechanics
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