Open AccessErratum: Monte Carlo simulation of registration signals for electron beam microfabrication
Author(s) -
Yi-Ching Lin,
I. Adesida,
Andrew R. Neureuther
Publication year - 1981
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.92509
Subject(s) - microfabrication , monte carlo method , cathode ray , electron , computer science , materials science , physics , nuclear physics , medicine , mathematics , statistics , alternative medicine , pathology , fabrication
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