Open AccessErratum: X-ray determination of strain and damage distributions in ion-implanted layers
Author(s) -
V. S. Speriosu,
H. L. Glass,
T. Kobayashi
Publication year - 1979
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.90898
Subject(s) - strain (injury) , ion , materials science , ion implantation , crystallography , chemistry , anatomy , biology , organic chemistry
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