Calculation of the dynamics of surface melting during laser annealing
Author(s) -
C. M. Surko,
A. L. Simons,
D. H. Auston,
J. A. Golovchenko,
R. E. Slusher,
T. Venkatesan
Publication year - 1979
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.90619
Subject(s) - annealing (glass) , materials science , semiconductor , laser , pulsed laser , melting point , thermal , thermodynamics , optics , composite material , optoelectronics , physics
We present a thermal transport model to describe the melting and resolidification of semiconductors which is observed to occur during annealing with a pulsed laser. The temperature‐dependent properties of both the solid and liquid are included. We compare this calculation with experimental results for the time duration of the melted surface for crystalline Si and Ge. The temperature of the liquid surface as a function of time is calculated and effects associated with the hot liquid and the vapor are also discussed.
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