Open AccessOn the sputtering of binary compounds
Author(s) -
P. K. Haff,
Z.E. Switkowski
Publication year - 1976
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.89180
Subject(s) - sputtering , binary number , stoichiometry , materials science , binary alloy , chemistry , thin film , metallurgy , nanotechnology , alloy , arithmetic , mathematics
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