Open AccessAnalysis of submicron defects using an SEM-Auger defect review tool
Author(s) -
Kenton D. Childs,
David G. Watson,
Dennis F. Paul,
S.P. Clough
Publication year - 1998
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1063/1.56922
Subject(s) - auger electron spectroscopy , auger , wafer , materials science , semiconductor , metrology , auger effect , particle (ecology) , nanotechnology , optoelectronics , semiconductor device , optics , atomic physics , physics , oceanography , layer (electronics) , geology , nuclear physics
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