Open AccessDopant characterization round-robin study performed on two-dimensional test structures fabricated at Texas Instruments
Author(s) -
Vladimir A. Ukraintsev,
R. S. List,
Mi-Chang Chang,
Hal Edwards,
C. Machala,
Richard San Martin,
Vladimir V. Zavyalov,
J. S. McMurray,
C. C. Williams,
Peter Wolf,
Wilfried Vandervorst,
D. Venables,
Suneeta S. Neogi,
Diana L. Ottaviani,
Joseph J. Kopanski,
J. F. Marchiando,
Brian G. Rennex,
Jochonia Nxumalo,
Yufei Li,
D. J. Thomson
Publication year - 1998
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1063/1.56919
Subject(s) - dopant , materials science , characterization (materials science) , round robin test , doping , optoelectronics , nanotechnology , statistics , mathematics
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