Open AccessDetermination of shallow dopants in silicon by low-temperature FTIR spectroscopy
Author(s) -
H. Ch. Alt,
M. Gellon,
M.G. Pretto,
R. Scala,
F. Bittersberger,
Kenneth Hesse,
Andreas Kempf
Publication year - 1998
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1063/1.56896
Subject(s) - dopant , fourier transform infrared spectroscopy , silicon , materials science , analytical chemistry (journal) , calibration , infrared spectroscopy , fourier transform , absorption (acoustics) , temperature measurement , fourier transform spectroscopy , doping , infrared , spectroscopy , atmospheric temperature range , optoelectronics , chemistry , optics , physics , organic chemistry , chromatography , quantum mechanics , composite material , meteorology
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