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Plan view TEM sample preparation using the focused ion beam lift-out technique
Author(s) -
F. A. Stevie,
R. B. Irwin,
T. L. Shofner,
S. R. Brown,
J. L. Drown,
Lucille A. Giannuzzi
Publication year - 1998
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1063/1.56881
Subject(s) - materials science , focused ion beam , wafer , silicon , tungsten , grain size , machining , micrograph , semiconductor , sample preparation , ion milling machine , lift (data mining) , layer (electronics) , optoelectronics , composite material , scanning electron microscope , metallurgy , ion , computer science , chemistry , physics , chromatography , quantum mechanics , data mining

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