Open AccessTransmission electron microscopy investigation of titanium silicide thin films
Author(s) -
A. F. Myers,
Eric B. Steel,
Lisa M. Struck,
H. I. Liu,
J.A. Burns
Publication year - 1998
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1063/1.56879
Subject(s) - materials science , transmission electron microscopy , silicide , high resolution transmission electron microscopy , annealing (glass) , silicon , electron diffraction , titanium , scanning electron microscope , thin film , analytical chemistry (journal) , tin , scanning transmission electron microscopy , electron energy loss spectroscopy , optoelectronics , diffraction , nanotechnology , optics , metallurgy , chemistry , composite material , physics , chromatography
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