Open AccessMicroscopy and spectroscopy characterization of small defects on 200mm wafers
Author(s) -
C. R. Brundle,
Yuri Uritsky,
Patrick Kinney,
W. Huber,
Andrew Green
Publication year - 1998
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1063/1.56854
Subject(s) - wafer , characterization (materials science) , materials science , microscopy , spectroscopy , scattering , optical microscope , particle (ecology) , nanotechnology , analytical chemistry (journal) , optoelectronics , scanning electron microscope , optics , chemistry , composite material , physics , quantum mechanics , oceanography , chromatography , geology
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