Open AccessElements for successful sensor-based process control {Integrated Metrology}
Author(s) -
Stephanie Watts Butler
Publication year - 1998
Language(s) - Uncategorized
Resource type - Conference proceedings
DOI - 10.1063/1.56836
Subject(s) - metrology , advanced process control , process (computing) , computer science , process control , control (management) , metric (unit) , scrap , systems engineering , manufacturing engineering , reliability engineering , engineering , operations management , mechanical engineering , statistics , mathematics , artificial intelligence , operating system
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