Open AccessX-ray scanning photoemission microscopy of titanium silicides and Al-Cu interconnects
Author(s) -
Gian F. Lorusso,
H. H. Solak,
Simrjit Singh,
F. Cerrina,
P. J. Batson,
J. H. Underwood
Publication year - 1998
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1063/1.56833
Subject(s) - electromigration , microelectronics , materials science , scanning electron microscope , titanium , x ray photoelectron spectroscopy , analytical chemistry (journal) , optoelectronics , photoemission electron microscopy , optical microscope , optics , electron microscope , metallurgy , chemistry , physics , nuclear magnetic resonance , chromatography , composite material
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