Open AccessGauging the future: The long term business outlook for metrology and wafer inspection equipment
Author(s) -
David S. Perloff
Publication year - 1998
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1063/1.56812
Subject(s) - metrology , wafer , term (time) , reliability engineering , manufacturing engineering , computer science , engineering , electrical engineering , physics , optics , quantum mechanics
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom