Open AccessOptical studies of phosphorus-doped poly-Si films
Author(s) -
Stefan Zollner,
Ran Liu,
Jim Christiansen,
Wei Chen,
Kathy Monarch,
Tan-Chen Lee,
R. Baliram Singh,
Jane Yater,
W. M. Paulson,
Chris Feng
Publication year - 1998
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1063/1.56809
Subject(s) - materials science , raman spectroscopy , ellipsometry , doping , annealing (glass) , silicon , analytical chemistry (journal) , transmission electron microscopy , polycrystalline silicon , amorphous solid , crystallite , amorphous silicon , chemical vapor deposition , thin film , optoelectronics , optics , crystallography , crystalline silicon , nanotechnology , composite material , chemistry , thin film transistor , metallurgy , physics , chromatography , layer (electronics)
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