Open AccessNon-contact monitoring of electrical characteristics of silicon surface and near-surface region
Author(s) -
P. Roman,
Matt D. Brubaker,
J. Staffa,
E. Kamieniecki,
Jerzy Rużyłło
Publication year - 1998
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1063/1.56804
Subject(s) - materials science , silicon , dopant , surface (topology) , optoelectronics , nanotechnology , doping , geometry , mathematics
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