Open AccessVerification of carrier density profiles derived from spreading resistance measurements by comparing measured and calculated sheet resistance values
Author(s) -
R. G. Mazur,
S. Ramey,
C. L. Hartford,
E. J. Hartford,
M. Kouno,
L.S. Tan
Publication year - 1998
Language(s) - English
Resource type - Conference proceedings
DOI - 10.1063/1.56799
Subject(s) - sheet resistance , bevel , spreading resistance profiling , materials science , dopant , electrical resistivity and conductivity , doping , enhanced data rates for gsm evolution , diffusion , composite material , layer (electronics) , optoelectronics , electrical engineering , computer science , structural engineering , engineering , physics , thermodynamics , telecommunications
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