Resonant laser ablation: Mechanisms and applications
Author(s) -
James E. Anderson,
Todd M. Allen,
Aaron W. Garrett,
Chris G. Gill,
P. H. Hemberger,
Peter B. Kelly,
N. S. Nogar
Publication year - 1997
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.52183
Subject(s) - laser ablation , ablation , materials science , thin film , laser , mass spectrometry , spectrometer , analytical chemistry (journal) , profiling (computer programming) , optoelectronics , optics , nanotechnology , chemistry , computer science , physics , environmental chemistry , engineering , aerospace engineering , chromatography , operating system
We will report on aspects of resonant laser ablation (RLA) behavior for a number of sample types: metals, alloys, thin films, zeolites and soil. The versatility of RLA is demonstrated, with results on a variety of samples and in several mass spectrometers. In addition, the application to depth profiling of thin films is described; absolute removal rates and detection limits are also displayed. A discussion of possible mechanisms for low-power ablation are presented.
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom