Ion beam enabled nanoscale fabrication, surface patterning, and self-assembly
Author(s) -
J. E. E. Baglin
Publication year - 2020
Publication title -
applied physics reviews
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 5.084
H-Index - 66
ISSN - 1931-9401
DOI - 10.1063/1.5143650
Subject(s) - nanoscopic scale , fabrication , materials science , nanotechnology , ion beam , ion , focused ion beam , optoelectronics , beam (structure) , optics , chemistry , physics , medicine , alternative medicine , organic chemistry , pathology
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