Open AccessJunction engineering in two-stepped recessed SiGe MOSFETs for high performance application
Author(s) -
Yasmin Abdul Wahab,
Norhayati Soin,
Muhammad Nihal Naseer,
Hanim Hussin,
Rozana Aina Maulat Osman,
Mohd Rafie Johan,
Nor Aliya Hamizi,
Omid Akbarzadeh,
Zaira Zaman Chowdhury,
Suresh Sagadevan,
Thennarasan Sabapathy
Publication year - 2020
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5142125
Subject(s) - materials science , optoelectronics , engineering physics , mosfet , annealing (glass) , silicon , threshold voltage , electronic engineering , electrical engineering , voltage , computer science , engineering , transistor , composite material
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