Phase transformation in MOCVD growth of (AlxGa1−x)2O3 thin films
Author(s) -
A F M Anhar Uddin Bhuiyan,
Zixuan Feng,
Jared M. Johnson,
HsienLien Huang,
Jith Sarker,
Menglin Zhu,
Md Rezaul Karim,
Baishakhi Mazumder,
Jinwoo Hwang,
Hongping Zhao
Publication year - 2020
Publication title -
apl materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/1.5140345
Subject(s) - metalorganic vapour phase epitaxy , materials science , chemical vapor deposition , thin film , analytical chemistry (journal) , homogeneity (statistics) , chemical composition , diffraction , atom probe , transmission electron microscopy , phase (matter) , scanning electron microscope , crystallography , epitaxy , chemistry , optics , nanotechnology , composite material , statistics , mathematics , organic chemistry , physics , layer (electronics) , chromatography
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