Open AccessMaskless visible-light photolithography of copper microheater for dynamic microbioreactor
Author(s) -
Muhammad Satrio Utomo,
Yudan Whulanza,
Gandjar Kiswanto
Publication year - 2019
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5139386
Subject(s) - microheater , microfabrication , materials science , photolithography , heating element , optoelectronics , photomask , heat transfer , lithography , joule heating , nanotechnology , fabrication , layer (electronics) , composite material , resist , mechanics , medicine , alternative medicine , physics , pathology
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