Metal oxide catalyzed epitaxy (MOCATAXY) of β-Ga2O3 films in various orientations grown by plasma-assisted molecular beam epitaxy
Author(s) -
Akhil Mauze,
Yuewei Zhang,
Takeki Itoh,
Feng Wu,
James S. Speck
Publication year - 2020
Publication title -
apl materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/1.5135930
Subject(s) - molecular beam epitaxy , materials science , indium , epitaxy , oxide , doping , metal , catalysis , analytical chemistry (journal) , crystallography , optoelectronics , inorganic chemistry , nanotechnology , metallurgy , chemistry , layer (electronics) , biochemistry , chromatography
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