Open AccessA closed-loop constant deposition current control method based on MCED circuit model
Author(s) -
Xiaobo Liao,
Jian Zhuang,
Yalou Deng,
Zhiwu Wang,
Qiangqiang Zheng,
Yong Q. Cai,
Xingyuan Lu
Publication year - 2020
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5133878
Subject(s) - deposition (geology) , materials science , current (fluid) , fabrication , meniscus , copper , electroplating , nanotechnology , optoelectronics , optics , layer (electronics) , metallurgy , physics , thermodynamics , paleontology , sediment , medicine , alternative medicine , incidence (geometry) , pathology , biology
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