Open AccessEffects of axial magnetic field on discharge characteristics of inductively coupled plasma
Author(s) -
Shengwu Zhang,
Yiwen Li,
Wang Ma,
Xiaolong Wei,
Wenyuan Zhang
Publication year - 2020
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5133831
Subject(s) - langmuir probe , atomic physics , plasma , electron , electron density , magnetic field , electron temperature , chemistry , inductively coupled plasma , physics , plasma diagnostics , nuclear physics , quantum mechanics
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