Open AccessThe superior properties of CrN coatings prepared by high power pulsed reactive magnetron sputtering
Author(s) -
Qian Li,
Lizhen Yang,
Zhengduo Wang,
Haibao Zhang,
Zhongwei Liu,
Qiang Chen
Publication year - 2020
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5132783
Subject(s) - high power impulse magnetron sputtering , materials science , chromium nitride , sputter deposition , indentation hardness , microstructure , coating , cavity magnetron , scanning electron microscope , metallurgy , sputtering , composite material , nitride , thin film , nanotechnology , layer (electronics)
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