Open AccessDesign and simulation of polyisobutylene/silicon nitride for detection of gas sensing
Author(s) -
Mukesh Kumar,
Deepak Bhadu
Publication year - 2019
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5131589
Subject(s) - finite element method , materials science , microelectromechanical systems , surface acoustic wave , silicon nitride , trichloroethylene , frequency shift , silicon , layer (electronics) , acoustics , surface acoustic wave sensor , optoelectronics , work (physics) , composite material , mechanical engineering , chemistry , optics , structural engineering , engineering , environmental chemistry , physics
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