Open AccessNumerical simulation and validation of subsurface modification and crack formation induced by nanosecond-pulsed laser processing in monocrystalline silicon
Author(s) -
Hiroki Kiyota,
K. Hara,
Marc Jankowski,
M. M. Fejer
Publication year - 2020
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.5130701
Subject(s) - materials science , monocrystalline silicon , residual stress , laser , silicon , nanosecond , composite material , irradiation , laser power scaling , optics , optoelectronics , physics , nuclear physics
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