Open AccessEnhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N 112¯ thin films
Author(s) -
Anli Ding,
Lutz Kirste,
Yuan Lu,
R. Driad,
Nicolas Kurz,
V. Lebedev,
Tim Christoph,
Niclas M. Feil,
Roger Lozar,
Thomas Metzger,
O. Ambacher,
Agnė Žukauskaitė
Publication year - 2020
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.5129329
Subject(s) - wurtzite crystal structure , materials science , resonator , thin film , diffraction , wavelength , coupling (piping) , resonance (particle physics) , substrate (aquarium) , sputter deposition , optics , optoelectronics , polar , sputtering , epitaxy , layer (electronics) , physics , composite material , nanotechnology , atomic physics , oceanography , astronomy , geology
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