Open AccessPassivation of III–V surfaces with crystalline oxidation
Author(s) -
P. Laukkanen,
M. Punkkinen,
M. Kuzmin,
K. Kokko,
J. Lång,
Robert M. Wallace
Publication year - 2021
Publication title -
applied physics reviews
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 5.084
H-Index - 66
ISSN - 1931-9401
DOI - 10.1063/1.5126629
Subject(s) - passivation , materials science , semiconductor , oxide , oxidizing agent , silicon , crystallographic defect , optoelectronics , nanotechnology , semiconductor device , chemistry , metallurgy , crystallography , layer (electronics) , organic chemistry