Open AccessIn-situ wafer temperature measurement during firing process via inline infrared thermography
Author(s) -
Daniel Ourinson,
Gernot Emanuel,
Attila Csordás,
Gunnar Dammaß,
H. J. W. Müller,
Christoph Sternkiker,
Florian Clement,
Stefan W. Glunz
Publication year - 2019
Publication title -
aip conference proceedings
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5125878
Subject(s) - thermocouple , thermography , wafer , materials science , temperature measurement , infrared , system of measurement , optoelectronics , composite material , optics , thermodynamics , physics , astronomy
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