Open AccessThree-dimensional measurement of Mg dopant distribution and electrical activity in GaN by correlative atom probe tomography and off-axis electron holography
Author(s) -
Lynda Amichi,
Isabelle Mouton,
Enrico Di Russo,
Victor Boureau,
Frédéric Barbier,
A. Dussaigne,
Adeline Grenier,
PierreHenri Jouneau,
Catherine Bougerol,
David Cooper
Publication year - 2020
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.5125188
Subject(s) - atom probe , electron holography , dopant , doping , materials science , electron , chemical vapor deposition , analytical chemistry (journal) , saturation (graph theory) , chemistry , optoelectronics , nanotechnology , transmission electron microscopy , physics , mathematics , quantum mechanics , chromatography , combinatorics
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