Open AccessCritical interface: Poly-silicon to tunneling SiO2 for passivated contact performance
Author(s) -
Bill Nemeth,
Steve Harvey,
David L. Young,
Matthew Page,
Vincenzo La Salvia,
Dawn Findley,
Abhijit S. Kale,
San Theingi,
Paul Stradins
Publication year - 2019
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5123857
Subject(s) - passivation , wafer , materials science , silicon , quantum tunnelling , degradation (telecommunications) , layer (electronics) , optoelectronics , oxide , carbon fibers , nanotechnology , contamination , chemical engineering , electronic engineering , composite material , metallurgy , ecology , composite number , engineering , biology
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