Open AccessPhosphorus gettering of impurities at low-temperature annealing for enhancing the performance of p-type PERC
Author(s) -
Supawan Joonwichien,
Yasuhiro Kida,
Masaaki Moriya,
Satoshi Utsunomiya,
Katsuhiko Shirasawa,
Hidetaka Takato
Publication year - 2019
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5123854
Subject(s) - getter , passivation , wafer , materials science , carrier lifetime , annealing (glass) , silicon , impurity , optoelectronics , photoluminescence , common emitter , quantum efficiency , analytical chemistry (journal) , layer (electronics) , nanotechnology , metallurgy , chemistry , organic chemistry , chromatography
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