Open AccessImpact of vacuum grippers utilized for automated wafer handling prior a-Si passivation for silicon heterojunction solar cells
Author(s) -
Andreas Fischer,
Anamaria Moldovan,
J. Rentsch
Publication year - 2019
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5123851
Subject(s) - passivation , wafer , materials science , grippers , optoelectronics , silicon , crystalline silicon , heterojunction , scanning electron microscope , nanotechnology , composite material , mechanical engineering , layer (electronics) , engineering
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