Open AccessAtomic layer deposition of functional multicomponent oxides
Author(s) -
Mariona Coll,
Mari Napari
Publication year - 2019
Publication title -
apl materials
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.571
H-Index - 60
ISSN - 2166-532X
DOI - 10.1063/1.5113656
Subject(s) - atomic layer deposition , fabrication , nanotechnology , materials science , thin film , deposition (geology) , atomic units , atomic layer epitaxy , layer (electronics) , nanostructure , oxide , characterization (materials science) , metallurgy , physics , medicine , paleontology , alternative medicine , pathology , quantum mechanics , sediment , biology
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