Optical constants and band gap of wurtzite Al1−xScxN/Al2O3 prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41
Author(s) -
M. Baeumler,
Yuan Lu,
Nicolas Kurz,
Lutz Kirste,
Mario Prescher,
Tim Christoph,
J. Wagner,
Agnė Žukauskaitė,
O. Ambacher
Publication year - 2019
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.5101043
Subject(s) - wurtzite crystal structure , band gap , materials science , scandium , analytical chemistry (journal) , ellipsometry , crystallite , sputter deposition , epitaxy , thin film , cavity magnetron , direct and indirect band gaps , optoelectronics , chemistry , sputtering , layer (electronics) , nanotechnology , metallurgy , chromatography , zinc
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