Open AccessPlasma chemistry and dust-particle generation in pure methane plasma: Influence of the RF electrode cleanliness
Author(s) -
Isabelle GéraudGrenier,
Maxime Mikikian,
François Faubert,
Véronique MassereauGuilbaud
Publication year - 2019
Publication title -
journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.699
H-Index - 319
eISSN - 1089-7550
pISSN - 0021-8979
DOI - 10.1063/1.5099326
Subject(s) - electrode , methane , plasma , particle (ecology) , chemistry , analytical chemistry (journal) , coating , deposition (geology) , particle size , chemical physics , environmental chemistry , physics , oceanography , organic chemistry , geology , paleontology , quantum mechanics , sediment , biology
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