Open AccessEffect of Ti-Al cathode grain size on plasma generation and thin film synthesis from a direct current vacuum arc plasma source
Author(s) -
Igor Zhirkov,
Andrejs Petruhins,
P. Polcik,
S. Kolozsvári,
Johanna Rosén
Publication year - 2019
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5092864
Subject(s) - cathode , materials science , grain size , cathodic arc deposition , analytical chemistry (journal) , torr , scanning electron microscope , plasma , hot cathode , vacuum arc , metallurgy , composite material , chemistry , electrode , cathodic protection , anode , chromatography , quantum mechanics , thermodynamics , physics
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