Open AccessLow temperature wafer-scale synthesis of hexagonal boron nitride by microwave assisted surface wave plasma chemical vapour deposition
Author(s) -
Rupesh Singh,
Golap Kalita,
Rakesh D. Mahyavanshi,
Sudip Adhikari,
Hideo Uchida,
Masaki Tanemura,
Masayoshi Umeno,
Toshio Kawahara
Publication year - 2019
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5091529
Subject(s) - materials science , x ray photoelectron spectroscopy , chemical vapor deposition , analytical chemistry (journal) , boron nitride , band gap , fourier transform infrared spectroscopy , substrate (aquarium) , absorption spectroscopy , optoelectronics , chemical engineering , nanotechnology , chemistry , optics , organic chemistry , oceanography , geology , engineering , physics
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