Open AccessTunable Ge content and thickness in hemispherical-shell shaped SiGe recess channels created by proximal Ge nanospheres
Author(s) -
Chia-Tsong Chen,
K.-P. Peng,
T. George,
HorngChih Lin,
Pei-Wen Li
Publication year - 2019
Publication title -
aip advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.421
H-Index - 58
ISSN - 2158-3226
DOI - 10.1063/1.5088554
Subject(s) - nanoshell , materials science , substrate (aquarium) , germanium , shell (structure) , layer (electronics) , curvature , nanotechnology , optoelectronics , silicon , composite material , nanoparticle , oceanography , geometry , geology , mathematics
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