Open AccessDevelopment of a new NEG pump using oxygen-free Pd/Ti thin film
Author(s) -
Takashi Kikuchi,
Tetsuya Miyazawa,
Hiromu Nishiguchi,
Kazuhiko Mase
Publication year - 2019
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.177
H-Index - 75
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5084677
Subject(s) - getter , sublimation (psychology) , materials science , vacuum pump , body orifice , analytical chemistry (journal) , mechanical engineering , chemistry , optoelectronics , psychology , chromatography , engineering , psychotherapist
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