Open AccessInjection of atomic hydrogen from a thermal cracker cell to plasma grid surface of a H− ion source
Author(s) -
Yuji Shimabukuro,
Tatsuya Kuzumi,
M. Wada
Publication year - 2018
Publication title -
aip conference proceedings
Language(s) - English
Resource type - Conference proceedings
eISSN - 1551-7616
pISSN - 0094-243X
DOI - 10.1063/1.5083722
Subject(s) - hydrogen , ion source , atomic physics , ion , plasma , materials science , plasma cleaning , microwave , analytical chemistry (journal) , chemistry , physics , organic chemistry , chromatography , quantum mechanics
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